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cleanroom-metrology-controller

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Nanofabrication metrology skill for process control with CD-SEM, ellipsometry, and profilometry

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How to use this skill

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Source SKILL.md: https://github.com/a5c-ai/babysitter/blob/HEAD/library/specializations/domains/science/nanotechnology/skills/cleanroom-metrology-controller/SKILL.md

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Cleanroom Metrology Controller

Purpose

The Cleanroom Metrology Controller skill provides comprehensive in-line metrology for nanofabrication process control, enabling precise measurement and monitoring of critical dimensions, film thicknesses, and pattern quality.

Capabilities

  • CD-SEM measurement recipes
  • Spectroscopic ellipsometry analysis
  • Film thickness mapping
  • Surface profilometry
  • Defect inspection
  • Overlay measurement

Usage Guidelines

Metrology Control

  1. CD-SEM Measurements

    • Develop automated recipes
    • Calibrate against reference
    • Track process variation

  2. Ellipsometry

    • Select appropriate model
    • Map thickness uniformity
    • Characterize optical constants

  3. Defect Inspection

    • Set detection thresholds
    • Classify defect types
    • Track yield trends

Process Integration

  • All fabrication processes
  • Analysis Pipeline Validation

Input Schema

{
  "measurement_type": "cd_sem|ellipsometry|profilometry|defect",
  "target_parameter": "string",
  "wafer_map": {"sites": "number", "pattern": "string"},
  "specification": {
    "target": "number",
    "tolerance": "number"
  }
}

Output Schema

{
  "measurements": [{
    "site": "string",
    "value": "number",
    "unit": "string"
  }],
  "statistics": {
    "mean": "number",
    "std_dev": "number",
    "range": "number"
  },
  "uniformity": "number (%)",
  "pass_fail": "boolean",
  "trending_data": {"dates": [], "values": []}
}